Slightly stable systems include piezoelectric ceramic driving and implementation of amplification. 精动系统包括压电陶瓷驱动和执行放大以及计算机控制系统。
The features and applications in superprecision turnings of piezoelectric ceramic inching motion devices are introduced. 介绍了压电陶瓷微动机构的性能特点及在超精密车削加工中的多种用途。